Turbo Molecular Pump, F-400 / 3500B, Hoʻoluʻolu wai, ʻAila lubrication

Hōʻike Pōkole:

Hoʻokumu ʻo KYKY i nā aila lubrication aila lubrication o ka compact a me ka hana kiʻekiʻe me nā mea maikaʻi o ke ʻano kuʻina, hana maʻalahi, hoʻonohonoho maʻalahi, ka laulā noi ākea a me ka hana paʻa.


ʻIke kikoʻī

Nā huahana huahana

Pono: 

Maikaʻi kēia moʻo o ka pauma ma ka hana ma lalo o ke kaiapuni ʻoʻoleʻa (ke kiʻekiʻe wela, ka lepo, a me nā mea ʻē aʻe), kūpaʻa i ka hana a me ke ola lōʻihi, a me ka mālama maʻalahi a me ka hana maʻalahi pū kekahi.

Nā noi: 

ʻO nā noi nui i ka ʻike ʻana i ka liu ʻenehana, PVD, CVD, ion implantation, mīkini uila uila e hana ana, aniani low-E, aniani ITO, uhi aniani, nā hunaola uila, kuʻihao uila uila, umu ahi a me nā ʻoihana ʻē aʻe

Hoakaka:

ʻO Flange (Ma)  DN400 ISO-K Kinoea ma (sccm) N2: 5500
ʻO Flange (Ma waho) KF DN100 He : 4000
ʻO ka wikiwiki pumping (L / s) N2: 3500 H2: 3200
ʻO ia: 2650 Ar : 2100
H2: 1280 ʻO ka wikiwiki huli (rpm) 13500
Ar : 3200 ʻO ka manawa holo-manawa (min) 18
Lākiō Hoʻopilikia N2: 108 ʻAno ʻoluʻolu, Kūlana Wai
He : 103 ʻAi inu wai anuanu (L / min) 1
H2: 102 Mahana anuanu (℃) 25
Ar : 108 Hoʻohui Mana: Anakahi uila, V AC) DC24 / AC220
Pākuʻi Ultimated (Pa) 6 × 10-6 Max.Kauoha Mana (W) ≤1100
Max. Kaomi mau loa-holo mau (Pa) 100 Ke Ana Hoʻohālike FD-III
Max. Puʻupuʻu mau loa N2: 300 Kaona (kgs) 130

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