Pono:
Maikaʻi kēia moʻo o ka pauma ma ka hana ma lalo o ke kaiapuni ʻoʻoleʻa (ke kiʻekiʻe wela, ka lepo, a me nā mea ʻē aʻe), kūpaʻa i ka hana a me ke ola lōʻihi, a me ka mālama maʻalahi a me ka hana maʻalahi pū kekahi.
Nā noi:
ʻO nā noi nui i ka ʻike ʻana i ka liu ʻenehana, PVD, CVD, ion implantation, mīkini uila uila e hana ana, aniani low-E, aniani ITO, uhi aniani, nā hunaola uila, kuʻihao uila uila, umu ahi a me nā ʻoihana ʻē aʻe
Hoakaka:
ʻO Flange (Ma) | DN400 ISO-K | Kinoea ma (sccm) | N2: 5500 |
ʻO Flange (Ma waho) KF | DN100 | He : 4000 | |
ʻO ka wikiwiki pumping (L / s) | N2: 3500 | H2: 3200 | |
ʻO ia: 2650 | Ar : 2100 | ||
H2: 1280 | ʻO ka wikiwiki huli (rpm) | 13500 | |
Ar : 3200 | ʻO ka manawa holo-manawa (min) | 18 | |
Lākiō Hoʻopilikia | N2: 108 | ʻAno ʻoluʻolu, Kūlana | Wai |
He : 103 | ʻAi inu wai anuanu (L / min) | 1 | |
H2: 102 | Mahana anuanu (℃) | 25 | |
Ar : 108 | Hoʻohui Mana: Anakahi uila, V AC) | DC24 / AC220 | |
Pākuʻi Ultimated (Pa) | 6 × 10-6 | Max.Kauoha Mana (W) | ≤1100 |
Max. Kaomi mau loa-holo mau (Pa) | 100 | Ke Ana Hoʻohālike | FD-III |
Max. Puʻupuʻu mau loa | N2: 300 | Kaona (kgs) | 130 |